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Trimos TR Scan

The TR Scan series offers high-precision, non-contact measurement solutions with advanced technology. The TR Scan Compact WLI utilizes White Light Interferometry (WLI) and a piezo motor for sub-nanometric resolution, enabling fast and accurate measurements on various materials. Its compact design integrates easily into lab environments, with manual and optional motorized tables for extended measurement ranges.
The TR Scan Compact Z, using Confocal Chromatic Microscopy Point (CCMP) technology, specializes in precise height measurements on delicate materials like gold and transparent surfaces. With a high-speed Z-measuring system (2000 Hz), it enables real-time analysis of moving parts.
The TR Scan Premium Pack 3D is designed for high-tech applications requiring unmatched speed and accuracy. It delivers nanometric precision, making it ideal for measuring sensitive surfaces in medical appliances, semiconductors, MEMS, metallic layers, and optical components. Capturing 3D images in microseconds, it sets a new benchmark in fast and precise metrology.
Made In
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Features:

  • Non-contact measurement
  • Small footprint design
  • Measuring range: 400 µm
  • Resolution: 0.1 nanometer (nanometric resolution)
  • Extremely easy to use with intuitive camera controls and adjustable brightness
  • Exchangeable optics, or mounted on a carousel
  • Height / delta / min / max measurements
  • Quick movements for fast operation
  • Easy-to-use software with pre-programmed measurement templates
  • High accuracy in measurements
  • Capable of measuring on moving parts
  • Exceptional measurement speed
  • State-of-the-art software
  • Compatible with 2D and 3D standards

Technical Specifications:
TR Scan Compact WLI

WLI 2.5x WLI 5x WLI 10x WLI 20x WLI 50x WLI 100x
Resolution 0.1 nm 0.1 nm 0.1 nm 0.1 nm 0.1 nm 0.1 nm
Lateral resolution (X/Y) 4.81 µm 4.81 µm 1.2 µm 0.9 µm 0.66 µm 0.52 µm
Measuring range 400 µm 400 µm 400 µm 400 µm 400 µm 400 µm
Measuring range X/Y ~4536 µm
x
~3447 µm
~2268 µm
x
~1723 µm
~1134 µm
x
~861 µm
~567 µm
x
~430 µm
~226 µm
x
~172 µm
~113 µm
x
~86 µm
Optical Zoom 2.5x 5x 10x 20x 50x 50x
Working distance ~10.3 mm ~9.3 mm ~7.4 mm ~4.7 mm ~3.4 mm ~3.4 mm

TR Scan Compact Z

TR Scan Compact Z
Optical sensor Working distance 31.8 mm
Measuring range 8 mm
Resolution 0.1 µm
Numerical aperture 0,25
Maximum angle of measurement 90° +/- 15°
Spot size 15 µm
MEP 0.6 µm
X/Y measuring system Type of system Incremental
Resolution 1 µm
MEP ~ 10 µm
Interface connection 2x USB 2.0
Vision Video stream Live image
Field of view 7 x 5.25 mm
Resolution 1600 x 1200
Pixel size ~4.3 µm
Sensor type colour CMOS
Other Interface connection 2x USB 2.0

TR Scan Premium Pack 3D

Specifications CCM-L1 0.2mm CCM-L1 1mm CCM-L1 4mm
Vertical measurement range 200 µm 0.95 mm 3.9 mm
Line width 0.96 mm ± 0.01 mm 1.91 mm ± 0.01 mm 4.78 mm ± 0.02 mm
Lateral spacing 5 µm 10 µm 25 µm
Working distance 5.3 mm ± 0.2 mm 18.5 mm ± 0.2 mm 41 mm ± 0.2 mm
Spot size 2 µm 4 µm 10 µm
Lateral resolution 1 µm 2 µm 5 µm
Accuracy ± 80 nm ± 300 nm ± 1.2 µm
Digital opening 0.7 0.55 0.33
Maximum measurement angle 90°+/-44° 90°+/-33° 90°+/-20°
Thickness measurement range 20 μm – 280 μm 75 μm – 1.35 mm 300 μm – 5.5 mm
Minimum Ra measurement 1) < 0.1 µm < 0.8 µm NA
Technology

Tactile Measurements 1D/2D

Industry

Automotive & Auto Ancillary, Aerospace, Defense, Government & R&D, Pharma & Med-Tech, Heavy, Power generation, Electronic & Communication, Tooling

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